Overview
Using the ‘Soft’ icon, default parameters can be set in six sub-windows such as Logbook control, Fast Acquisition, SX Control, Peak Identity, Image Info and Mass Absorption Coefficient (MAC).
In Logbook control, ‘Vacuum Refresh Period (min)’ and ‘Temperature Refresh Period (min)’ options can be adjusted and stored in ASCII-formatted files. These files are accessible from
C:\Cameca SX Shared\Logbook\
Fast Acquisition
Under Fast Acquisition, default parameters for WDS, Profile and Image acquisitions set in the SX Control program in the Fast Acquisition section can be tuned.
SX-Control
The list of preset-controlled beam currents can be defined under SX-Control but viewed under the ‘Soft’ tab. The number of items in the list (up to 12) is defined by double-clicking in the text field. By default, a list of 8 predefined beam currents is available. Disable ‘Off’ and ‘Standy’ buttons hide beam controls.
Ability to blank the beam after adjusting or testing PHA distribution, searching for a peak or after crystal verification (Peak Verify), is also set in the SX-Control sub-window of the Soft Utility.
Peak Identify
Using the ‘Peak Identify’ sub-window sets ‘Auto Identify’ function parameters. Users can select the desired number of points for the Curves Smooth, apply a ‘Peak Discrimination’ criteria for peak selection versus background, and finally specify a ‘Width Factor’ to compare experimental and theoretical peak positions.
Image Info
Under ‘Image Info’, the µMarker length (µm) can be adjusted, and users can choose to have Energy and Beam Intensity parameters displayed or not.
Mass Absorption Coefficient
The last sub-window provides a list of Mass Absorption Coefficient (‘Current MAC Set’) tables to choose the default one. Each one is associated with a quantification model. The six tables available are Cameca, Chantler, Henke, Thinh & Leroux, MAC30 and FFAST. Selected one become the default table in the Mac Set Utility.
Reading Duration 1min
Options pertaining to the ‘Camera’ tab are accessed through the dedicated icon on the left side bar of the Configuration program.
Reading Duration 3min
The Aperture Position and Beam parameters are accessible through the Beam/SEM tab which can be opened by clicking on the dedicated icon.
Reading Duration 3min
The ‘Source’ tab contains the source, current and electronic lenses settings
Reading Duration 4min
This section deals in detail with the definition of the holders and the positioning of samples and references in them.