Configuration – Status

Overview

The ‘Status’ tab, accessible through one click on its dedicated icon, tests the individual mechanical parts of the Spectrometers, Stage, Aperture and SEM. This is why four of the five functions available in this sub-window pertain to ‘Test’, as illustrated on figure below. Althrough mainly designed for CAMECA’s certified FSEs or AEs, users might be asked to perform some tests to help expedite the troubleshooting sequence. 

Spectrometers

To evaluate the well-being of the Spectrometers, this test allows them to travel from their lower to upper mechanical limits. A variety of modular parts can be tested individually and successful results are indicated by a check mark.

Stage

The Stage may also undergo testing in all three spatial directions to ensure no mechanical issue exists. A variety of modular parts can be tested individually and successful results are indicated by a check mark. ‘Verify’, ‘Move Allocation’ and ‘Locked’ check mark are automatically managed by Peaksight and indicate successfull test. During testing, as Stage movements will be predefined, the only way to unlock the Stage is to click on ‘Clear’. The later can be used in case of bug with the stage position or motion.

Aperture

Testing of the Aperture is possible only in the X and Y directions, as the Aperture strip is very thin, and therefore does not have variations in Z influencing its proper positioning.

SEM

The SEM sub-window provides a real-time column status where 14 conditions might be tested and checked.