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ETU – Configuration – Menu

The default parameters of the ETU software are managed in the ETU Configuration program. After clicking the ‘Enable’ button, it is possible to edit the parameters. To disable editing, and return to view-only mode, click on the ‘Disable’ button.

For each category, it is possible to reset the parameters by clicking the ‘Reset to Default’ button.

Description of Categories in Configuration Menu:

Focus Auto Config

There are two methods available for Auto Beam Focus: Standard and Dynamic Focus.

Intermediary images acquired during either Auto Focus routine may be saved to files (path: [User Directory]\[project]\[sample]\Images&Profiles, with filename ‘FocusAuto’+date).

In the Standard Method, the beam focus value (BFoc) is adjusted in steps around a reference value. An electron image is captured and analyzed at each focus step. The focus value of the sharpest image is retained. Both the reference value and number of steps (number of images) may be defined. The focus step size is based on the image magnification and number of steps.

In the Dynamic Focus Method, the beam focus value is varied as a function of the Y scan position. As an aside, dynamic focus is also a function used for maintaining beam focus across a flat sample which is tilted about the X-axis. Only one image is acquired. The range of focus adjustment is determined by the image magnification. Each line of the image is evaluated for sharpness and the focus value corresponding to the line with the best sharpness is retained at the end of the routine.

For each method, the use of a Gaussian smoothing filter (for noise reduction), choice of sharpness algorithm (Sobel or Marr-Hildreth) and choice of current or preset column conditions may be selected.

Astigmatism Auto Config

There are two methods available for Auto Astigmatism: Standard and Asti Scan.

Intermediary images acquired during either Auto Astigmatism routine may be saved to files (path: [User Directory]\[project]\[sample]\Images&Profiles, with filename ‘AstiAuto’+date).

In the Standard Method, a series of images are acquired over a range of stigmator amplitudes and angles. The ranges are progressively refined, based on analysis of the resultant images, until convergence to optimal settings, within a few degrees of stigmator angle and a few units of amplitude.

The Asti Scan Method automates the CAMECA-developed ‘Stigmator Aid’ function. Images are acquired at several image rotations in ‘Stigmator Aid’ mode. The barycenter of the area of sharpness corresponds to the optimal stigmator amplitude and angle. The Asti Scan method requires acquisition of fewer images than the Standard method.

Video Auto Config

There is only one method available for Video Auto: Standard.

Intermediary images acquired during the Video Auto routine may be saved to files (path: [User Directory]\[project]\[sample]\Images&Profiles, with filename ‘VideoAuto’+date).

The use of a Gaussian smoothing filter (for noise reduction) and choice of current or preset column conditions may be selected. A separate column condition may be defined for the cathodoluminescence detector.

For the video amplifier and each imaging detector type, there is a default starting value or setting.

Expert System Config

For WDS scan acquisitions, a default setup file (.qtiSet) can be defined, as well as the number of points, point dwell time, and number of scan accumulations.

For EDS acquisitions, a default acquisition time can be defined.

For the Expert System (SysExpert), several filters may be applied during selection of x-ray measurement parameters in the ‘expert’ algorithm:
- Only use X-ray calibration newer than n months
- Avoid using multiple crystals on a single spectrometer (no flipping)
- Use only K, L, or M lines as a function of atomic number, Z
- For background simulations, define the half width range (in sin theta ‘steps’) of the output spectrum
- For precision calculations, use 1- s or 3 s-values

Check Standard Config

For the specific Quanti Check Standard routine, the acceptable variation (in relative weight percent) depends on the concentration of the element in the standard.

Check Machine Config

For the specific Quanti Check Machine routine, a beam setup, standard name and location, and stage automation pattern are defined.

Listing of Parameters and Their Default Values

Default values are shown in bold italics.

Focus Auto Config

Reset to default
Method Used [Standard/Dynamic Focus]
Save to File [True/False]
Standard Method

Measurement Number [value, def=10]
Smooth Filter [True/False]
Sharpness Algorithm [Sobel/MarrHildreth]
Focus reference [value, def=3200]
Column conditions

Use Current Conditions [True/False]
Scan Mode [256/512/1024]
Scan Speed [value dependent on Scan Mode and line frequency]

Dynamic Focus Method

Smooth Filter [True/False]
Sharpness Algorithm [Sobel/MarrHildreth]
Column conditions

Use Current Conditions [True/False]
Scan Mode [256/512/1024]
Scan Speed [value dependent on Scan Mode and line frequency]

Astigmatism Auto Config

Reset to default
Method Used [Standard/Asti Scan]
Save to File [True/False]
Standard Method

Measurement Number [value, def=10]
Smooth Filter [True/False]
Sharpness Algorithm [Sobel/MarrHildreth]
Maximum Amplitude used [value, def=1000]
Ratio between Fine and Coarse search [value, def=2]
Starting Amplitude for Coarse search [value, def=225]
Column conditions

Use Current Conditions [True/False]
Scan Mode [256/512/1024]
Scan Speed [value dependent on Scan Mode and line frequency]

Asti Scan Method

Smooth Filter [True/False]
Sharpness Algorithm [Sobel/MarrHildreth]
Column conditions

Use Current Conditions [True/False]
Scan Mode [256/512/1024]
Scan Speed [value dependent on Scan Mode and line frequency]

Video Auto Config

Reset to default
Method Used [Standard]
Save to File [True/False]
Standard Method

Measurement Number [value, def=10]
Smooth Filter [True/False]
Column conditions

Use Current Conditions [True/False]
Scan Mode [256/512/1024]
Scan Speed [value dependent on Scan Mode and line frequency]

Gain [value, def=350]
Dark Level [value, def=610]
SE Offset [value, def=480]
ABS Gain [Low/High]
BSE Gain [Low/Medium/High]
BSE Coupling [Off/On]
BSE Pola [Grnd/Bias]
BSE HQ Gain [value, def=150]
BSE HQ Offset [value, def=500]
BSE HQ Gain Range [Low/Med/High/V.High]
Cathodo offset [value, def=480]
Cathodo Column Conditions

Scan Mode [256/512/1024]
Scan Speed [value dependent on Scan Mode and line frequency]

Expert System Config

Reset to default
WDS

Analysis
Analysis Setup [*.wdsSet filename]
# points [value, def=1000]
# Accumul. [value, def=1]
Dwell Time (ms) [value, def=500]

EDS

Acq Time (s) [value, def=20]

SysExpert

Use Only Recent Calibrations [True/False]
Within (Months) [value, def=6]
Avoid crystal flipping if possible [True/False]
Select only K line(s) for Z = 24 to 32 [True/False]
Select only L line(s) for Z = 57 to 71 [True/False]
Select only M line(s) for Z >= 72 [True/False]
Half Range for Bg simulation (2D > 40) [value, def=20000]
Half Range for Bg simulation (2D <=40) [value, def=6000]
Error estimation method [1 sigma/3 sigma]

Check Standard Config

Reset to default
Expected Variations (%)
Wt% (100-50) [value, def=1.0]
Wt% (50-10) [value, def=2.0]
Wt% (10-1) [value, def=5.0]
Wt% (<1%) [value, def=10.0]

Check Machine Config

Reset to default

Beam/SEM [Beam Setup Filename]
The parameters below are not editable (the values are from the Beam Setup]
Name
HV (kV)
I (nA)
Size (um)
Detector
Scanning

Sample

Name [Sample chosen from list]
X Y Z [Coordinates of above sample; user can update or move to XYZ]
Step for Automatic Shift [value, def=3]
Method for Automatic Shift [none/Horizontal/Vertical/Spiral]

Specification

For each spectrometer/crystal pair:
Sp# / Crystal name
Count(%) [value, def=10]
Pha(Volt) [value, def=0.25]
. . .

ETU – Introduction

Reading Duration 2min

Why a complex instrument should use a complex interface ? Trying to address this question leads us to rethink all of our softwares to turn them really easy to use. We had to forget all the way we develop softwares since decades and from a white paper, we imagined a new design that can hold advanced functionality together with intuitive touch-screen control in a unique window.

Start With Tactis ETU Software

Reading Duration 6min

Tactis ETU Software is a part of PeakSight 6.3 and late.

ETU – Setup/Stage

Reading Duration 4min

This part describes the SETUP/STAGE tab

Optical Microscopy

Reading Duration 4min

This article presents, in a tutorial mode, how to display and acquire high-quality images from optical microscopy system of the SX-FIVE. Functions are spread into ’Optical microscopy’ (all the hardware controls), ‘Save’ and ‘Mosaic’ subsections.

Scanning Electron Microscopy

Reading Duration 11min

Electronic images are provide though the Scanning Electron Microscopy functionalities of the SX-FIVE. Three detectors are available.

ETU – XLive

Reading Duration 10min

X Live is a powerful tool designed to draw real time X images using WDS or EDS detection. Images can be acquired separately or as a composite including SEM image as background.

ETU – XImages

Reading Duration 5min

This tab is dedicated to the acquisition of high resolution / high count rate chemical maps.

ETU – Quanti/Check

Reading Duration 18min

The ‘Quanti’ tab provides all the tools necessary to get quantified chemical analysis of any solid sample, but also a range of check procedures to ensure the instrument hardware is well set. Both of them can be reach though the sub-tabs ‘Quanti’ and ‘Check’.

Contact

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FAQ

Answers to some common questions from SX users

Troubleshooting

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