ETU – XImages

X Images is used for acquisition of X-ray maps collected by WDS and EDS spectrometers. The X-ray images can be collected simultaneously with a secondary or backscattered electron scanning electron microscope (SEM) image of the sample.

Selection of X-ray spectrometers and elements

The upper portion of the X Images panel is used to select the elements for mapping with WDS and EDS.  

WDS 

EDS

Choose the EDS spectrometer mode by pressing on the ‘EDS’ button .  Up to ten elements may be added to the EDS table.  Individual X-ray maps will be acquired for all selected EDS lines. Selection of at least one element by EDS will activate acquisition of EDS hypermap data, which includes a full EDS spectrum at each pixel of the map.  After map acquisition, a map of any element measured by EDS can be extracted from the hypermap data with the SX-Results program.

Press the ‘Periodic Table’ button .  Press on an element to add it to the EDS table.  Press on the element a second time to remove it from the table.

X Images acquisition

The lower portion of the X Images panel is dedicated to image parameter setup and acquisition.

Two parameters can be user-adjusted: Quality and Total Time.  
Quality affects the resolution of the images, from Low (coarse) to Extreme (fine).  
Total Time is the estimated time required to acquire the images.

The remaining parameters are determined by Quality and Total Time, and by the current instrument configuration.

• Scan size (µm) is the width of the scan field (width of image).
• Scan mode is determined by Scan Size.  If Scan size <75 µm, the images are scanning the Beam.  If Scan size is ≥ 75 µm, the images are made by scanning the Stage.
• Step size is calculated by Scan size/(# pixels in X axis)
• Definition is determined by Quality
• Dwell time (ms) is determined by the Quality (# of pixels) and Total Time.

Designate a filename for the image file, then press the ‘Run’ button  to start an X Images acquisition.

The ongoing acquisition is visible in the SxSAB window.  The acquisition completes after one frame.

Press the ‘Exit’ button  to stop the acquisition.

 

File saving
The SX Images images are saved as ‘impDat’ files.

‘impDat’ files are proprietary image formats developed by CAMECA.  They contain additional information, such as XYZ position and instrument configuration.  These files can be viewed only with CAMECA software.

The files are saved in the Images&Profiles folder within the currently defined path (Project/Sample) and can be opened in the SX-Results program for additional image processing, including exporting to other file formats, such as TIFF, JPEG, and BMP.